专利内容由知识产权出版社提供
专利名称：Method for fabricating a
microelectromechanical system (MEMS)device using a pre-patterned substrate
发明人：Mark A. Lucak,Richard D. Harris,Michael J.
Knieser,Robert J. Kretschmann
申请号：US09843563申请日：20010426
公开号：US20020158040A1公开日：20021031
专利附图：
摘要：A method for fabricating MEMS structure includes etching a recess in an upper
surface of a substrate that is bonded to a wafer that ultimately forms the MEMSstructure. Accordingly, once the etching processes of the wafer are completed, therecess facilitates the release of an internal movable structure within the fabricated MEMSstructure without the use of a separate sacrificial material.
申请人：LUCAK MARK A.,HARRIS RICHARD D.,KNIESER MICHAEL J.,KRETSCHMANNROBERT J.
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