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METHOD OF AND DEVICE FOR MEASURING EXTREMELY SMALL

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专利名称:METHOD OF AND DEVICE FOR MEASURING

EXTREMELY SMALL QUANTITY OF OXYGENIN GAS

发明人:SUZUKI, Takashi Nippon Sanso Kabushiki

Kaisha,ITOH, Kenkichi Nippon SansoKabushiki Kaisha,SASAKI, Hajime NipponSanso Kabushiki Kaisha

申请号:EP90912488.5申请日:19900827公开号:EP0440815B1公开日:19960306

摘要:This invention relates to a method of and device for measuring an extremelysmall quantity of oxygen in gas depending on the intensity of light generated whenyellow phosphor vapor is reacted with oxygen in the sample gas. Together with thesample gas, a fixed quantity of oxygen is continously fed to the reaction chamber andreacted with yellow phosphor vapor so that the intensity of light generated by saidreaction is measured. Density of oxygen in gas is found from the difference between avalue of measured intensity of light and that of the intensity of light generated onreaction of yellow phosphor vapor with added oxygen, or from the difference betweenoxygen density obtained from the measured value and that of added oxygen. Addition ofa fixed quantity of oxygen is performed in such process that pre-conditioned oxygen-containing gas is fed together with a fixed quantity of sample gas, or oxygen in theatmosphere is adapted to permeate an oxygen permeable film provided in the sample

gas feeding system or in the yellow phosphor vapor feeding system. An extremely smallquantity of oxygen under several ppb in the sample gas can continously be measured athigh precision.

申请人:NIPPON OXYGEN CO LTD

地址:JP

国籍:JP

代理机构:TER MEER - MÜLLER - STEINMEISTER & PARTNER

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