专利内容由知识产权出版社提供
专利名称:Light-transmitting imprinting mold and
method for manufacturing large-area mold
发明人:Yukihiro Miyazawa申请号:US14651765申请日:20140121公开号:US10052798B2公开日:20180821
专利附图:
摘要:An imprint method including the steps of: an exposing step to irradiate a photocuring resin, coated on a large-area substrate, with a curing light while the light-transmitting imprint mold is pressed against the photo curing resin, an amount of the
curing light applied onto the photo curing resin in a light shielding region provided withthe light shielding member made less than an amount of the curing light applied ontothe photo curing resin in a light transmitting region of the mold so that a portion of thephoto curing resin in the light shielding region is semi-cured by the use of the lightshielding member provided so as to reproduce the concave-convex pattern of thetransparent substrate.
申请人:SOKEN CHEMICAL & ENGINEERING Co., Ltd.
地址:Tokyo JP
国籍:JP
代理机构:Maier & Maier, PLLC
更多信息请下载全文后查看