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专利名称：Apparatus and a method for
electrochemical mechanical processing withfluid flow assist elements
发明人：Yongqi Hu,Stan D. Tsai,Gerald
Alonzo,Lakshmanan Karuppiah
申请号：US11431231申请日：20060510
公开号：US20070151867A1公开日：20070705
专利附图：
摘要：An apparatus and a method with fluid flow assist elements for electrochemical
mechanical processing is provided in this invention. In one embodiment, the apparatusincludes a first conductive layer having an upper surface adapted to contact a substrate, asecond conductive layer disposed below the first conductive layer, an isolation layerdisposed between the conductive layers, and a plurality of apertures, each having a firstend formed through the first conductive layer and a second end formed through thesecond conductive layer, wherein the second ends of at least two apertures are laterallycoupled by a channel.
申请人：Yongqi Hu,Stan D. Tsai,Gerald Alonzo,Lakshmanan Karuppiah
地址：San Jose CA US,Fremont CA US,Los Gatos CA US,San Jose CA US
国籍：US,US,US,US
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